Abstract
In laser micromachining of a monocrystalline lithium niobate substrate (LN), degradation factors of surface qualities and unstable material removal are investigated in both material characteristics and process conditions, to develop high-precision microprocessing technology in manufacturing of LN-MEMS. Various factors such as composition irregularity, polarity of polarization domain, oscillation stability of pulsed laser, registration accuracy in focusing, heat, cause process instabilities and surface deteriorations. The process instabilities and surface deteriorations due to heat is controllable by pulse energy density, pulse interval and number of pulse shots, focus spot profile and process environment.
