Abstract
For improving the efficiency of the Nano-scale machining, we propose a vibration cutting method by using a microcantilever as a cutting tool instead of the usually used scratch cutting method. We optimize the microcantilever in shape so that the excitation force could be efficiently transferred to the tip and load a diamond ground by FIB (Focused Ion Beam) on it. In a series of machining experiment, we employ two kinds of excitation methods based on sinusoidal excitation and feedback control. Under the former and latter excitations, the microcantilever is externally excited and self-excited, respectively. By analyzing and contrasting experimental results with two kinds of vibration cutting methods, we demonstrated the machining product is improved by using the self-excited vibration cutting method because the microcantilever could keep in the resonant state regardless of the change of the natural frequency during machining.
