Abstract
Flow characteristics of single-phase nitrogen in the three different micro-channels of layered MEMS have been investigated numerically in view of the effect of compressibility and viscosity heating. It is shown from the computing results that the influence of viscosity heating increases with increasing Re and reducing channel size. Compressibility becomes obviously in lower Mach number with smaller channel size. In this paper, the effect of size, ratio of length to diameter, entrance effect and pressure drop on resistance characteristic are analyzed. The accuracy of calculation results has been confirmed by experimental data of Zhang[1].
