Abstract
The concentration of radioactive aerosols in the containment increases rapidly during the serious nuclear accidents. The common aerosol filters use mesh structures or filter papers, which can significantly increase the flow resistance in the course of aerosol deposition and retard the containment pressure relief following the nuclear accidents. In addition, filter papers replacement is also a technological problem, and the used filter papers will turn into radioactive solid wastes. This paper proposes and studies MEMS inertial impactor filter that filtrates and collects one to three microns atmospheric particles without introducing much flow resistance and replacing filter papers. The model is developed and the analysis is made with help of the calculation results.