Abstract
This study was conducted to develop applications using CoFeSiB/SiO_2 composite multilayer film with a high quality factor of more than 100. It is necessary that the efficiency of the micro DC・DC converter be increased by incorporating a high quality factor inductor capable to minimizing the generation of heat due to magnetic loss. The terms for high Q values of inductors depend on both low iron loss of magnetic thin film cores and low copper loss of air coils. We have developed high Qind herical coil inductor of more than 50 using these composite multilayere film. The maximum value is obtained at the frequency of about 40MHz ∿ 50MHz. To attain the optimum micro-power supply, it is necessary to use a high Q inductor which has a low loss magnetic core and an air core.
