Abstract
Polymer microfabrication methods are becoming increasingly important as low-cost alternatives to the silicon or glass-based MEMS technologies. This paper describes a new process suitable for fabrication of micro periodic structure in optical waveguide. Si mold were fabricated using electron beam lithography and fast atom beam etching. Grating coupler were fabricated by replication of polymers using the mold. The grating coupler was evaluated with a monochromator.
