Abstract
Fabrication process of micro electro magnetic motor has been developed. Multi-layered coils and flexible wiring patterns are formed on a silicon substrate using the semiconductor processing technique. After coils are made, the substrate is removed by etching from the reverse side to obtain a sheet on which multi-layered coils have been formed. Core pieces are made by wire-cut electric discharge machining, and the flexible sheet with coils is wound around core pieces. A 2-pole magnetized permanent magnet is separately fabricated as a rotor Using this process, a prototype micro-motor 1.6 mm in diameter was fabricated and the output power of 3.2×(10)^<-7> Nm was obtained.
