Development and Application of Micro Robots with Precise Tools

Abstract

This paper describes the micro robots system that are euipped with unique micro tools for precise operations. The main body is composed of the piezo elements and the electromagnets for providing the accurate inch worm locomotion. On this locomotion platform, several tools such micro drill, vibration stylus, micro pippete are implemented to achieve the specified precise applications. And some of these micro robots are improved to work in the vaccum chamber of the scanning electron microscope for nano level manipulation. These results show the typical performances and the potential benefits for the low cost micro production system.