Abstract
Probe oxidation-based surface-nanofabrication has been presented. Electrochemically generated oxide nano ridge structure can be fabricated using probes for atomic force microscopy. Moreover, removing the oxide ridge by hydrofluoric acid etching, nano groove structures can also be obtained. The relationship between the shape of nanostructures and fabrication conditions such as applied voltage, probe scan speed, and radius of curvature of the probe. Finally, nano structures with very small height or depth (several tens-nm wide and sub-nm high or deep) have been fabricated by our method. This is very useful for clarifying nanotribology of micro or nanomechanical devices.
