Abstract
We have developed micro-piezoelectric actuators using PZT thin films. PZT thin films with composition of Zr/Ti=53/47 were grown on the (111)Pt/Ti/Si substrates by rf-sputtering. Micro-cantilevers, composed of PZT thin films and Cr elastic layers, were successively fabricated as unimorph actuators with a length of 500um and width of 90μm. The tip deflection of the cantilevers was measured using a Laser Doppler Vibrometer and we observed piezoelectric vibration level as high as 0.62μm at a relatively small voltage of 5.0V. However, the micro-cantilevers had large initial bending because of residual stress in the PZT and Cr layers.
