The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
2005
Session ID : 1111
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1111 The fabrication and the application of valveless micropump driven by traveling wave
Hidetoshi HATATakaaki SUZUKIIsaku KANNOHidetoshi KOTERAK
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Abstract
Micropumps are one of the most important microfluidic components in Micro Total Analysis System (μTAS). We have developed a valveless micropump driven by traveling wave, and obtained high energy efficiency. In this paper, the valveless micropump was fabricated by the microfabricatin technique to verify the validity of the pumping principle. The micropump was composed of flexible walls of a microchannel with piezoelectric bimorph cantilevers. Traveling wave was induced on the surface of the microchannel by applying sinusoidal voltages to each piezoelectric cantilever with the different phase, and the peristaltic motion of the channel wall transports the fluid. The fluid flow of the proposed micropump was measured using Micro particle Image Verocimetry (MicroPIV). The traveling wave micropump driven by the piezoelectric actuators is a simple structure without valves and a low cost disposable device.
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© 2005 The Japan Society of Mechanical Engineers
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