Abstract
It is necessary to study the characteristics of materials in atomic scale because electric devices are scaling down to nanometer size. In nano scale, the peculiar structures and phenomena on the surface of materials ware observed. Nano-contact is one of the important atomic scale structures to investigate such nano scopic phenomena. In this paper, a MEMS (Micro Electro Mechanical System) device with movable opposing tips was fabricated to observe nano-contact. This device is actuated electrostatically in the transmission electron microscope (TEM). And tilt-evaporation which can make hetero-material opposing tips was proposed and inspected.
