Abstract
We describe a new class of atomic force microscope (AFM) which provides tweezers function in addition to atomic force observation. In order to integrate a function of nano-manipulation with AFM, we have developed new micromachined tweezers, named AFM tweezers. This device has two wedged probes at the end of cantilevers; one is used for AFM observation (sensing probe) and another (movable probe) for grasping a small object which is just observed by the sensing probe. The integrated functions of AFM observation and manipulation enables us to do a precise approach even to a small object which cannot be observed though an optical microscope; consequently successful manipulation is realized. Moreover in order to develop the AFM tweezers, we have designed software for operation of the AFM tweezers which can be installed to SPA400 AFM system (SII Nanotechnology Inc.). In this prototype software, manipulation sequence including approach, grasp, and pick-up is automated.
