Abstract
Ubiquitous sensor network will be an important role in various social systems for environment, safe, security, medical and so on. Sensor network needs a power supply systems for a wireless communication systems. However, a battery power supply system has to change a battery because of its life time. On the other hand, an electric power generation system has a possibility of non-maintenance. In this paper, we propose a micro electric power generation device using a ferroelectric film. A PZT film as a ferroelectric material is formed on a micro cantilever, and an electric power is generated when the cantilever is bended and stressed by piezoelectric effect. The device is fabricated by MEMS technique. The cantilever had 1200 μm in length, 600 μm in width, and 50 μm in thickness. We evaluated the power generation device. The resonant frequency was 8.81 kHz and the maximum displacement was 3.51μm. We achieved a 418 pW generation under the optimum impedance condition.
