Abstract
We have examined a three-terminal comb-drive actuator as a displacement sensor. In our design, a vibrating comb-electrode is sandwiched with a fixed electrode and a movable electrode. When the movable electrode makes a displacement by an external applied force, frequency of the self-oscillated comb-electrode is changed; eventually we can detect its displacement. In this paper, we showed a self-oscillation circuit and oscillation wave form of the three-terminal comb-drive actuator and the experimental result displacement measurement.
