Abstract
Thought some electrostatic microactuators are proposed for micro electro mechanical systems, the electrostatic force/energy has not been used fully and the output power of the microactuators is small yet. We already proposed the novel drive principle of the microactuator in which electrostatic energy can be converted into a mechanical work efficiently by making electrostatic energy collaborate with the elastic energy. It was named Energy Conversion-type Micro Actuator powered by Collaboration of Electrostatic and Elastic energies/forces, EC-Macbee. In this research, the non-liner spring of the actuator and the fabrication process were designed and we tried to make the drive element of actuator in order to realize this actuator.
