The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
2008
Session ID : 2208
Conference information
2208 New micro Fabrication Techniques Utilizing Electrostatic Inkjet Phenomena
Shinjiro UMEZUKazutoshi KATAHIRAHitoshi OHMORIHiroyuki KAWAMOTO
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Abstract
Electrostatic inkjet phenomena took place when high voltage was applied between an insulative capillary tube filled with ion conductive liquid and a metal plate electrode. Droplet diameter and dropping frequency were controlled by the voltage application. We developed new micro fabrication techniques using commercial etching liquid based on the electrostatic inkjet phenomena. The first technique was a thinning of metal rod. The diameter of the rod was controlled by the time of voltage application between the capillary tube and the metal rod. The other technique was a drilling on a shin metal sheet. Small holes were punctured on the shin sheet. Hole diameter, some 10 μm to some 100 μm was controlled by the amplitude of applied voltage.
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© 2008 The Japan Society of Mechanical Engineers
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