Abstract
Conventional ellipsometric microscopes have low resolution because the oblique imaging plane to an optical axis decreases the focused area when high resolution objective lenses are used. In this paper, we represent a new imaging method. Once the film is formed in space by the first optical system and observed by the second imaging system. This enables that we place the imaging plane vertical to the optical axis and expand the focused area. Using this method, we achieved a lateral resolution of 0.78 μm and a focused area of 115 μm. We also successfully visualized a liquid nano-thick film sheared by an optical fiber probe.
