Abstract
Conventional friction force microscopes (FFMs) had the disadvantage of low force sensitivity due to mechanical interference between torsion caused by friction force and deflection by normal force. To overcome this disadvantage, we developed a dual-axis micro-mechanical probe that measures the lateral force with a double cantilever and the vertical force with a torsion beams. We investigated force sensitivities by FFM measurements and mechanical interference by finite element method. It is clarified that the dual-axis probe has high force sensitivity and low crosstalk effect.
