P-1-8 Influence of microchannel width on a microdevice for single-cell manipulation

Abstract

In this study, we investigated influence of the microchannel width on a microdevice for single-cell manipulation. The proposed device was fabricated by the Single-Mask inclined exposure method which can fabricated a lot of micro-holes to fix cells and lower microchannel to load reagent. We estimated the restriction of the fabrication process due to the width of the lower microchannel. Moreover, we proposed a reduction method of the warp of the fabricated device made of the thick permanent film resist to achieve a wide lower microchannel.