The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
2011
Session ID : D-1-4
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D-1-4 Piezoelectric MEMS Scanner Mirrors Composed of PZT Thin Films on Metal-based Substrates
Shuhei MATSUSHITAIsaku KANNORyuji YOKOKAWAHidetoshi Kotera
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Abstract
In this study, we have developed metal-based MEMS scanner mirrors driven by PZT piezoelectric thin films not only to simplify fabrication process but also to improve fracture toughness of the micro-actuators. The 2 μm-thick PZT thin films were directly deposited on preliminarily microfabricated metal-based substrates of titanium or stainless steel by RF-magnetron sputtering. We could achieve a large mechanical angle tilt of 6.21° at high resonant frequency of 35.02 kHz by low application voltage of 10V_<p-p>. Use of microfabricated metal-based substrates for the PZT deposition enables simpler process and stronger toughness of scanner mirrors compared with the conventional Si-based ones.
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© 2011 The Japan Society of Mechanical Engineers
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