Abstract
The microactuator that makes electrostatic energy/force collaborate with the elastic energy/force has been proposed. It has the non-liner spring that was designed to work effectively and the vertical electrode that moves parallel to the substrate. We propose the novel microactuator that has the vertically movable electrode to generate more powerful electrostatic energy/force. It is necessary to determine the concept of vertically movable non-linear leaf spring to make the microactuator highly effective. In this paper, the concept of non-linear leaf spring is proposed and is proved its characteristic by using the FEM analysis.
