Abstract
Simultaneous measurement of normal and lateral forces with accurate gap control is essential to clarify lubrication phenomena at nanometer-sliding gaps.Double ended tuning fork type quartz resonators can provide high force sensitivity by miniaturizing their dimensions.In this study,decreasing the width of the quartz oscillator down to 85μm,the minimum detection limit of the force of 0.1μN has been attained.This method is useful to evaluate the lubrication phenomena of the small mechanical elements such as MEMS and head and disk interface of hard disk drives.
