Abstract
In a precision positioning stage of an electronic device manufacturing equipment,the mechanical resonant mode changes during transference or re-assembling of the equipment.We propose a notch filter design method in this paper that suppresses the positioning performance change by focusing on the mechanical resonant mode change.This method is also effective at suppressing the servo characteristic difference caused by the positioning coordinate in stages that have a large movable range.We conducted simulations to confirm that the positioning performance when the mechanical resonant mode changes.It was less than 3% that the difference between the original performance and one which was using this method.
