Abstract
We report the first step to build a mobile, low-power MEMS (Micro Electro Mechanical Systems) switch using two comb-drive actuators with a movable component. Sidewalls of the comb-drive fingers were covered with potassium ions doped electret films. As a result, a built-in electric field of 75 MV/m was generated between the opposing faces of the combs. These actuators are mechanically combined to a push-pull component to change the position between two mechanical states. Switching from one state to the other required only a voltage pulse (with an energy of 36 nJ) and thus, bistable actuation was achieved with low-power consumption.
