Development of FFM probe with a electrostatic actuator for gap control

Abstract

A probe for gap-controlled friction force microscopy (FFM) is presented. Electrodes were added to both the probe and micro electrode parts and normal electrostatic force was generated for compensation of normal force between the probe and sample. In addition, the probe had a see-saw structure and two actuators were fabricated at both ends of the probe in order to generate attractive and repulsive forces. A probe with about 30-μm electrode gaps were successfully fabricated by separately fabricating the probe and electrode parts with spacer structures and assembling them. Moreover, feasibility of gap control was experimentally confirmed.