Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 14, 2016 - March 15, 2016
Anti-stiction coating must be one of the key technologies to ensure reliability of NEMS devices and to improve accuracy in a nanoimprint lithography. Typically, polymer films were coated on a silicon surface for anti-stiction. In this study, we proposed vapor-phase deposition technique to form fluoropolymer film on silicon surfaces. Fluoropolymer used in this study was perfluoropolyether (PFPE) Fomblin Zdol (molecular weight of 2000 amu). As a substrate to coat the Zdol, we used a silicon wafer. Anti-stiction properties were verified by measuring surface energies by a contact angle measurement and also by measuring stiction forces using an atomic force microscope (AFM). As a result, it was revealed that the films thicker than 0.5 nm effectively reduced the adhesion forces down to approximately a half of that of the bare silicon surface.
