HDI tribological characteristics of composite lubricant film deposited by photoelectoron assisted CVD

Abstract

To increase HDD capacity, the thickness of lubricant film on the magnetic disks need to be reduced. The lubricant film deposited by using the photoelectron assisted chemical vapor deposition (PACVD) with low molecular weight perfluoropolyether (PFPE) lubricant showed high bond ratio, low surface energy and high coverage. In this study, we compared the tribological performances on head-disk interface of PFPE lubricant films deposited by PACVD with DC bias voltage and RF pulse bias voltage. As the result, the lubricant film deposited by DC and RF pulse voltage showed very high touch down power (TDP). In addition, the lubricant film deposited by RF pulse voltage showed low slider wear.