Development of a micro probe with a minute glass sphere for measurement of lubrication at nanometer gaps

Abstract

A new type of sliding probe for clarifying nano-lubrication phenomena is proposed. In the probe, a small glass sphere was attached with a micro structure for force detection. This enabled us to increase the design freedom such as the curvature and material of the sliding surface. In this study, we successfully fabricated the probe and demonstrated the feasibility of nano-rheological measurement for the confined lubricant.