Abstract
This paper describes piezoelectric vibration energy harvester (PVEH). The PVEH was fabricated from Pb(ZrTi)O3 (PZT) thin films which were deposited onto (Pb,La)TiO3/Pt/Ti-coated stainless steel substrate by rf-magnetron sputtering. We measured output power of the PVEH as well as theoretical calculation. The output power showed maximum at the calculated optimal load resistance of 73.2 kΩ, where the output power was 1.0 μW. For the purpose of predicting output power, we tried to derive electromechanical coupling coefficient. Applying an equivalent circuit model of the energy harvester, we succeeded in deriving electromechanical coupling coefficient.
