Abstract
Our objective is individual driving mirrors in multi-axis scanning Micro Electro Mechanical Systems (MEMS) mirror array by single superposed driving signal. If each vibration mode of the mirrors has separated resonant frequency, the MEMS mirror in the array can be individually by single superposed driving signal composed of sine waves with the resonant frequencies of the modes. To control each mirror of the array individually, we designed beam width and length to control the resonant frequency of each vibration mode. Each frequency is separated by 20 times of each half-value width of the nearest resonant frequency signal. Four types of three-axis scanning MEMS mirror was fabricated into the array. Measuring deflection angles by superposed signal, each vibration mode had been driven independently of sine waves with other resonant frequencies. This result indicated that all vibration mode can be driven individually in the same time.
