The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
[volume title in Japanese]
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Flexible piezoelectric energy harvesters of PZT thin films
*Ryo HARADAToshihito UMEGAKIHirotaka HIDAIsaku KANNO
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Pages 2A06-

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Abstract

Interest in energy harvesters has grown rapidly over the last decade. In this study, we fabricate and evaluate piezoelectric energy harvesters (PEH) fabricated from Pb(ZrTi)O3 (PZT) thin films on stainless steel foils. The PZT thin films were deposited onto (Pb,La)TiO3/Pt/Ti-coated stainless steel substrate by RF-magnetron sputtering. Parallel and series connection of eachPEH enabled the output power increase as high as turning on a LED.

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© 2020 The Japan Society of Mechanical Engineers
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