The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
[volume title in Japanese]
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Examinations of broadband characteristics in electrostatic MEMS vibration power generators
*Tatsuhiko SUGIYAMATakuma ISHIGUROYasushi SHIBATAHiroshi TOSHIYOSHIGen HASHIGUCHI
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Pages P03-

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Abstract

This paper reports the electrostatic vibration energy harvesters(EVEH) indicating broadband characteristic at low frequency using nonlinear spring erects by electrostatic force of electret. In the device, the electret counter electrodes periodically pass each other due to vibration. The electrode period and the electret voltage were adjusted so that a flat region was generated in the potential energy. .In the simulation, when the electrode period was tripled, a six-fold short-circuit current was obtained at 40 Hz. The longer the flat band region of the potential, the larger the vibration amplitude at a minute acceleration.

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© 2020 The Japan Society of Mechanical Engineers
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