Reproduction of elastic properties with tactile sensor and precision stage

Abstract

In a micro world such as under a microscope, it is difficult to increase the stiffness of devices. Errors of deformation of tools impair the operability of tasks. Generally, in a macro world where we live, we design the tool to be larger, decreasing the errors by deformation. However in the micro world, using an excessively large tool with high rigidity for a small object leads to decrease of operability. In addition, the operation may be less accurate. Authors propose a compensation method to cancel the errors by reproducing negative elastic properties with a precision stage. In this paper, we analyzed the deformation of the tool and indicated that the error caused by the deformation can be compensated. We reproduce arbitrary elastic properties, controlling precision stage according to the force information detected by a tactile sensor. As a result, not only positive rigidity but also negative one were reproduced.