Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 08, 2021 - March 09, 2021
In this study, we fabricated flexible piezoelectric energy harvesters (PEHs) from Pb(ZrTi)O3 (PZT) thin films on stainless steel foils for wearable applications. The PZT thin films were deposited on Pt/Ti-coated stainless steel substrates of 30 μm by RF-magnetron sputtering. We measured output power by large bending deformation applied to PEHs. During periodic bending motion, the maximum output power of 150.4 μW was measured from the effective area of 380mm2 at a load resistance of 100 kΩ. Parallel connection of each PEH enabled the increase of output power sufficient for charging a battery and turning on a LED.
