Reproduction of elastic properties with tactile sensor and precision stage

Abstract

In a micro world such as under a microscope, errors of deformation of tools impair the operability. Increasing the rigidity of the tools decrease the error, but it causes the tools to become large. Authors propose a compensation method to cancel the errors by reproducing negative elastic properties with a precision stage. . In this paper, we analyzed the deformation of the tool and indicated that the error caused by the deformation can be compensated. We reproduce arbitrary elastic properties, controlling precision stage according to the force information detected by a tactile sensor. As a result, not only positive rigidity but also negative one were reproduced. In addition, using a stepping motor for driving the stage, high torque and high precision controll is possible in low speed range.