Very low power consumption switching regulator composed of the electret MEMS switch

Abstract

This paper proposes and demonstrates an electret MEMS switching device in purpose of voltage regulation of the charging voltage to be used in a vibration power generator system. The device can be operated with almost zero current consumption; hence it will be applicable to a vibration power generating system under low current generation conditions.

We have successfully regulated the charging voltage around 14V with the MEMS switching device having 240V electret potential.