Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 06, 2023 - March 07, 2023
In this paper, we propose a photothermally actuated micropump using a SU-8/Cu composite. The composite is mixure of a photoresist SU-8 and copper particles. The copper particles have photothermal effect induced by the light irradiance. This effect was utilized for the thermo-pneumatic actuation in the proposed micropump. The micropump was composed of a chamber, heater, reservoir, inlet, and outlet. The photothermally actuated heater was fabricated by photolithography of the composite. The other parts were fabricated using softlithography of polydimethylsiloxane. A maximum pumping volume and pressure of the fabricated micropump were 2.52 μL and 329 Pa at 15.4 W/cm2 of irradiance, respectively.
