Abstract
A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. An 8(mm)^2 square and 20 turns planar coil are used as a receiver coil. The operational frequency of the transmitter is set from 4 to 7MHz. The output voltage of the receiver was obtained maximally about 45V with a load resistance of more than 100kΩ. A conventional electrostatic comb drive microactuator was used for a prototype of a receiver. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuator was selectively controlled by changing the transmitter's frequency.
