Abstract
This paper reports on an actuated micro probe with a force sensor for inserting it into a cell. The resistance of the insertion was measured by a strain gauge located on the beams of an SOI wafer. The micro probe supported by 4 beams (1000×10×5[μm]) was vibrated by electrostatic actuators. This micro probe was inserted into a fish egg. The spring constant of a fish egg membrane, the fracture load of a fish egg, and the friction between the probe and an egg were measured. Two types of insertion, with/without vibration, were carried out in the experiment. The forces during the insertion with/without vibration are about 10[μN] and 6[μN], respectively. Therefore the vibration of the probe is useful for precise positioning.
