Abstract
This paper describes a high-powered metal bellows type gas-liquid phase-change actuator. The bellows of the actuator has been welded many coned disc springs of SUS304,which has 18 mm in diameter and 26 mm in total length of bellows. The operating liquid is perfluorocarbon (C_5F_<11>NO). The actuator has a 10 Ω heater and a thermistor for measuring operating liquid. The circuit board has also been fabricated to control the pulse width of heating time in balancing between heating and cooling in the air. The motion of the bellows with the above circuit board has closely resembled to Boyle's law. We confirmed two kinds of axial forces, which are 100 N at 1 mm displacement and 20 N at 7 mm under pulse controlling on 80 ℃ with supply of 12 W.
