Pages 818-823
As the micro-technologies are developed in the precision manufacturing, the importance of micro actuator is increasing. But conventional actuators, piggy-back type or mechanical contact type, have limits to cope with demanded performance. As a solution, the magnetic suspension technology, showed much possibility, has been researched. This paper is about the design and control of a magnetically suspended linear actuator. The operating principle is explained with the magnetic force analysis. The control logic to achieve smooth motion is described. Finally, the experimental results are given.