Abstract
In order to improve the wear resistance of stainless steel extrusion dies, the mechanical properties of diamond-like carbon (DLC) films deposited on SUS630 (17-4PH) substrates have been investigated. It was clearly shown that wear resistance of the dies was significantly improved when high-voltage pulse pretreatment was applied before DLC deposition by DC plasma CVD. The DLC film showed good wear resistance against cordierite clay in an extrusion experiment. Furthermore, in order to strengthen the adhesion between the DLC film and the substrate which were deposited, TiCN films was fabricated as a buffer layer between DLC and SUS630 substrates. It was found that DLC film with high adhesion strength was prepared at relatively low CH_4 gas pressure of 6 Pa.
