Abstract
LIGA process is a total micro-fabrication technology includes X-ray lithography, electroforming for micro metal, and replication. The replication processes like hot embossing and injection molding are very important because these techniques of a wide variety of materials for a reasonable price to micro system. For the replication process in the LIGA process, it seems to be very advantageous to use molds with smooth sidewall for release itself. We investigated the effects of controlling the beam intensity distribution for exposure changing X-ray mask tilted angle on the obtained quasi-3D resist pattern shapes. As the results, A PMMA resist master with inclined shape sidewall microstructures was successfully fabricated. Plastic products molded were evaluated with respect to the transferability and mold release.
