The Proceedings of the JSME Materials and Processing Conference (M&P)
Online ISSN : 2424-2861
10.2
Conference information
634 Design of a new Hot Embossing equipment for fabrication of microstructures
T. YamadaH. MekaruH. IshigakiR. MaedaT. Hattori
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Keywords: Hot Embossing, Polymer, LIGA
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 597-600

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Abstract
We present a new design of hot embossing equipment for fabrication of microstructures. This equipment mainly consists of upper and lower heating plates, vacuum chamber, force frame, alignment system for double side embossing, and de-embossing forces measurement system. This equipment has great potential to various experiments of the fabrication microstructures using hot embossing.
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© 2002 The Japan Society of Mechanical Engineers
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