638 Development of focused-ion-beam (FIB) machining systems for fabricating 3-D micro- and nano- structures

Abstract

We designed an FIB micro-machining system for making 3-D micro- and nano- structures. The system used an automatic sample stage tilting up to 93° for machining a pattern of bridge width from the top direction and the bridge height from the lateral direction by tilting the sample stage. The exact size of structures was etched by scanning the sample images from the top and lateral view. These etching methods using first in-situ FIB micro-machining system used in this system also showed many advantages for fabricating 3-D structure including tunneling devices.