The Proceedings of the JSME Materials and Processing Conference (M&P)
Online ISSN : 2424-2861
2005
Session ID : SMS-02
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SMS-02: Measurement of Thin Film Elasticity Using Nanoscopic Contact Resonance of a Flat Tip in Sensitivity-Enhanced Atomic Force Acoustic Microscopy(SMS-I: SMART MATERIALS AND STRUCTURES, NDE)
M. MURAOKA, S. KOMATSU, F. IZUMIDA
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© 2005 The Japan Society of Mechanical Engineers
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