Abstract
The surface wave velocity, C_R, depends on the stress, therefore, it is possible to evaluate the stress by using the C_R. The measured value of C_R is determined by V(z) curve obtained by the scanning acoustic microscope (SAM). But the C_R is influenced by the surface roughness, R, of sample, therefore it is problem to evaluate the stress by using the obtained C_R. In this paper, After the surface of sample was polished with emery paper, the R and the C_R were measured. And the effect of the R on the C_R was examined. As a result, the relation between R and C_R was obtained.
