Abstract
The evaluation of fracture toughness of micromaterials is extremely important to ensure reliability of microelements used in MEMS devices and micro-sized machines. In this investigation, fracture tests have been carried out on micro-sized specimens prepared from a Ni-P amorphous alloy thin film and its fracture behavior has been investigated. Cantilever beam type specimens with dimensions of 10 x 10 x 50 μm^3 were prepared by focused ion beam machining and notches with different directions, which are perpendicular and parallel to the deposition growth direction of the amorphous film, were introduced. Fatigue pre-cracks were also introduced ahead of the notches. Fracture behavior was different between the two types of specimens. The fracture toughness value of the specimen with the crack propagation direction being parallel to the deposition growth direction was higher than that with the crack propagation direction perpendicular to the deposition growth direction.
