Abstract
This paper reports the toughness of CVD diamond films in connection to their nanoscopic crystalline structures. We examined the toughness of diamond films deposited on silicon wafers with various methane concentrations in the source gas mixture. The crack paths and crystalline morphologies of deposited diamond were observed in detail by using scanning and transmission electron microscopy. Discussion would be focused on the correlation between the crack extension resistance and crystalline morphologies of diamond films.
